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Design and Fabrication of PDMS MLA Based on Digital Maskless Lithography Method

机译：基于数字无掩模光刻方法的pDms mLa的设计与制作

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Guangtao Xu; Yiqing Gaoa; Feng Lib; Xiaofeng Cui; Guowen Kuang;
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1. Fabrication of PDMS microlens array by digital maskless grayscale lithography and replica molding technique [J] . Kejun Zhong, Yiqing Gao, Feng Li, Optik: Zeitschrift fur Licht- und Elektronenoptik: = Journal for Light-and Electronoptic . 2014,第10期

机译：利用数字无掩模灰度光刻和复制成型技术制造PDMS微透镜阵列
2. Digital mirror devices and liquid crystal displays in maskless lithography for fabrication of polymer-based holographic structures [J] . Maik Rahlves, Christian Kelb, Maher Rezem, Journal of microanolithography, MEMS, and MOEMS . 2015,第4期

机译：无掩模光刻中的数字镜设备和液晶显示器，用于制造基于聚合物的全息结构
3. Fabrication of Passive Micromixer using a Digital Micromirror Device-based Maskless Lithography System [J] . Yong-Kyu Cho, Tae-Heon Han, Seok-Jae Ha, International Journal of Precision Engineering and Manufacturing . 2014,第7期

机译：使用基于数字微镜设备的无掩模光刻系统制造无源微混合器
4. Design and Fabrication of PDMS MLA Based on Digital Maskless Lithography Method [C] . Guangtao Xu, Yiqing Gao, Feng Li International Conference on Future Materials Engineering and Industry Application . 2015

机译：基于数字掩模光刻法的PDMS MLA设计与制造
5. Design, fabrication, and optical analysis of nanomirrors for maskless EUV lithography [D] . Shroff, Yashesh Ajitbhai 2003

机译：用于无掩模EUV光刻的纳米镜的设计，制造和光学分析
6. Design and Fabrication by Thermal Imprint Lithography and Mechanical Characterization of a Ring-Based PDMS Soft Probe for Sensing and Actuating Forces in Biological Systems [O] . Tommaso Dattoma, Antonio Qualtieri, Gianmichele Epifani, 2019

机译：通过热压印光刻技术设计和制造基于环的PDMS软探针用于生物系统中的传感和驱动力。
7. Digital mirror devices and liquid crystal displays in maskless lithography for fabrication of polymer-based holographic structures [O] . Rahlves Maik, Kelb Christian, Rezem Maher, 2015

机译：无掩模光刻中的数字镜设备和液晶显示器，用于制造基于聚合物的全息结构

Design and Fabrication of PDMS MLA Based on Digital Maskless Lithography Method

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