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A Novel Polyimide Film Preparation and Its Preferential-Like Chemical Etching Techniques for GaAs Devices

机译：一种新型聚酰亚胺薄膜制备及其对Gaas器件的优先化学蚀刻技术

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G. J. Kuhlmann; This Journal; W. D. Brown; W. W. Grannemann; Thin Solid; Yasoo Harada; Fumio Matsumoto; Takashi Nakakado;
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A Novel Polyimide Film Preparation and Its Preferential-Like Chemical Etching Techniques for GaAs Devices

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