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Influence of Electronegative Gas on the Efficiency of Conventional and Hollow Cathode Magnetron Sputtering Systems

机译：电负性气体对常规和空心阴极磁控溅射系统效率的影响

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D. A. Duarte; M. Massi; A. S. Da Silva Sobrinho; L. Tezani; L. C. Fontana;
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年度 2016
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1. Comparison between conventional and hollow cathode magnetron sputtering systems on the growing of titanium dioxide thin films: A correlation between the gas discharge and film formation [J] . Duarte D.A., Massi M., Da Silva Sobrinho A.S. The European physical journal. Applied physics . 2011,第2期

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2. Comparative Study of Total Power Density at a Substrate in Pulsed DC Magnetron and Hollow-Cathode Plasma Jet Sputtering Systems [J] . Martin Čada, Petr Virostko, ŠtěpÁn Kment, Plasma processes and polymers . 2009,第Supplementa1期

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3. Properties of Indium-Zinc-Oxide Films Synthesized by Radio Frequency Magnetron Sputtering Based on Gas Phase Monitoring Using Multi-Micro Hollow Cathode Lamp [J] . Mari Inoue, Takayuki Ohta, Naoki Takota, Japanese journal of applied physics . 2012,第11Issue1期

机译：基于多微空心空心灯气相监测的射频磁控溅射合成铟锌氧化物薄膜的性能
4. Influence of Electronegative Gas on the Efficiency of Conventional and Hollow Cathode Magnetron Sputtering Systems [C] . D. A. Duarte, rnM. Massi, rnA. S. da Silva Sobrinho, Microelectronics technology and devices-SBMicro 2009 . 2009

机译：电负性气体对常规空心阴极磁控溅射系统效率的影响
5. Growth and characterization of silicon carbide thin films using a nontraditional hollow cathode sputtering technique. [D] . Huguenin-Love, James. 2010

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6. Magnetron-Sputtered Biodegradable FeMn Foils: The Influence of Manganese Content on Microstructure Mechanical Corrosion and Magnetic Properties [O] . Till Jurgeleit, Lea Katharina Jessen, Eckhard Quandt, 2018

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7. The influence of pressure and gas flow on size and morphology of titanium oxide nanoparticles synthesized by hollow cathode sputtering [O] . Gunnarsson, Rickard, Pilch, Iris, Boyd, Robert, 2016

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Influence of Electronegative Gas on the Efficiency of Conventional and Hollow Cathode Magnetron Sputtering Systems

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