首页> 外文OA文献 >In Situ Observation System for Silicon Wafer Transient Deformation during Insertion/Withdrawal into/from Horizontal Furnaces

【2h】

In Situ Observation System for Silicon Wafer Transient Deformation during Insertion/Withdrawal into/from Horizontal Furnaces

机译：在插入/取出卧式炉时硅晶片瞬态变形的原位观察系统

页面导航

著录项
引文网络
相似文献
相关主题

著录项

作者
Manabu Itsumi; Junko Kai;
展开▼
作者单位

展开▼
年度 2016
总页数
原文格式 PDF
正文语种
中图分类

相似文献

外文文献
中文文献
专利

1. 矿柱回采诱发的深部房柱系统的瞬态及长期变形特性 [J] . 李夕兵, 邱加冬, 赵宇喆, 中国有色金属学报（英文版） . 2020,第010期
2. Plastic deformation in 200 mm silicon wafers arising from mechanical loads in vertical-type and horizontal-type furnaces [J] . A. Fischer, G. Kissinger, G. Ritter, Materials Science and Engineering . 2009,第期

机译：立式和卧式炉中的机械载荷导致200 mm硅片发生塑性变形
3. Experimental and numerical investigations into the transient multi-wafer batch atomic layer deposition process with vertical and horizontal wafer arrangements [J] . Dongqing Pan, Lulu Ma, Yuanyuan Xie, International Journal of Heat and Mass Transfer . 2015,第DECa期

机译：具有垂直和水平晶圆排列的瞬态多晶圆批处理原子层沉积工艺的实验和数值研究
4. Silicon Wafer Wafer Quartz furnace Tubes [J] . Scott Bankroff Fusion . 2005,第3期

机译：硅晶片硅晶片石英炉管
5. In situ particle monitoring in a single wafer poly silicon and silicon nitride etch system [C] . Busselman, B., Emery, . 1993

机译：单晶片多晶硅和氮化硅蚀刻系统中的原位颗粒监测
6. In-situ curvature and stress analyses for sputtered tungsten silicide/silicon multilayer thin films on silicon wafers. [D] . MacArthur, Kimberly Caitlin. 2010

机译：硅晶片上溅射的硅化钨/硅多层薄膜的原位曲率和应力分析。
7. In Situ Formation of Nanoporous Silicon on a Silicon Wafer via the Magnesiothermic Reduction Reaction (MRR) of Diatomaceous Earth [O] . Patrick Aggrey, Bakhodur Abdusatorov, Yuliya Kan, 2020

机译：通过硅藻土的磁热还原反应（MRR）在硅晶片上原位形成纳米多孔硅
8. Determination of the metallic-impurity distribution on a silicon wafer by the multiple indicator-rod method for liquid-phase dissolution and graphite-furnace AAS. [O] . Hiroyuki NAGASAWA, Masahisa ENOMOTO 1997

机译：液相溶解和石墨炉AAS的多指示棒法测定硅晶片上的金属 - 杂质分布。

In Situ Observation System for Silicon Wafer Transient Deformation during Insertion/Withdrawal into/from Horizontal Furnaces

著录项

引文网络

相似文献

相关主题

期刊订阅