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Basic aspects of Deep Lithography with Particles for the fabrication of micro-optical and micro-mechanical structures

机译：用于制造微光学和微机械结构的具有颗粒的深度光刻的基本方面

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Bart Volckaertsa; Pedro Vyncka; Luigi Cosentinob; Paolo Finocchiarob;
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年度 2008
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1. Deep proton lithography, a fabrication tool for micro-optical components [J] . M. Kufner, S. Kufner, P. Pichon, Entropie . 1995,第192a193期

机译：深质子光刻，一种用于微光学元件的制造工具
2. Fabrication of ultrahigh-aspect-ratio and periodic silicon nanopillar arrays using dislocation lithography and deep reactive-ion etching [J] . Ma Zhibo, Guo Tongxin, Cheng Shaolei, Journal of Micromechanics and Microengineering . 2019,第10期

机译：使用位错光刻和深反应离子蚀刻的超高纵向比和周期硅纳米玻璃阵列的制造
3. Fabrication of high aspect ratio comb-drive actuator using deep X-ray lithography at Indus-2 [J] . Rahul Shukla, V. P. Dhamgaye, V. K. Jain, Microsystem technologies . 2014,第7期

机译：在Indus-2上使用深X射线光刻技术制造高纵横比的梳齿驱动执行器
4. Basic aspects of Deep Lithography with Particles for the fabrication of micro-optical and micro-mechanical structures [C] . Bart Volckaerts, Pedro Vynck, Michael Vervaeke, Micro-Optics: Fabrication, Packaging, and Integration . 2004

机译：用于制造微光学和微机械结构的带颗粒的深光刻技术的基本方面
5. Design, fabrication and testing of hierarchical micro-optical structures and systems. [D] . Cannistra, Aaron Thomas. 2011

机译：分层微光学结构和系统的设计，制造和测试。
6. Fabrication of Tapered Micropillars with High Aspect-Ratio Based on Deep X-ray Lithography [O] . Jae Man Park, Jong Hyun Kim, Jun Sae Han, 2019

机译：基于深X射线光刻技术的高纵横比锥形微柱的制备
7. Plasmonic Nanoparticles: Scalable Fabrication of Multiplexed Plasmonic Nanoparticle Structures Based on AFM Lithography (Small 42/2016) [O] . Jianmei Chen, Yinghui Sun, Liubiao Zhong, 2016

机译：等离子体纳米粒子：基于AFM光刻的多路复用等离子体纳米粒子结构的可伸缩制造（小42/2016）
8. Modification of Polymer Surfaces and the Fabrication of Submicron-ScaleFunctionalized Structures by Deep-UV and Electron Beam Lithography [R] . Wybourne, M. N., Wu, J. C., Yan, M., 1993

机译：聚合物表面的改性及亚微米级功能化结构的深紫外和电子束光刻制备

Basic aspects of Deep Lithography with Particles for the fabrication of micro-optical and micro-mechanical structures

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