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Principal Component Analysis of Optical Emission Spectroscopy and Mass Spectrometry: Application to Reactive Ion Etch Process Parameter Estimation Using Neural Networks

机译：光学发射光谱和质谱的主成分分析：神经网络在反应离子刻蚀过程参数估计中的应用

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Reza Shadmehr; David Angell; Paul B. Chou; Gottlieb S. Oehrlein; Robert S. Joffe;
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年度 1992
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Principal Component Analysis of Optical Emission Spectroscopy and Mass Spectrometry: Application to Reactive Ion Etch Process Parameter Estimation Using Neural Networks

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