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Study of Extended Defect Structure Induced by Pulsed Laser Annealing in Implanted Silicon Crystals

机译：植入式硅晶体中脉冲激光退火引起的扩展缺陷结构研究

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Klinger Lefeld-Sosnowska Ymierska; B. Kozankiewicz (a; K. Reginâski (c;
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年度 2007
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1. Extended defect structure induced by pulsed laser annealing in Ge implanted Si crystal [J] . D. Klinger, M. Lefeld-Sosnowska, J. Auleytner Journal of Alloys and Compounds: An Interdisciplinary Journal of Materials Science and Solid-state Chemistry and Physics . 2001,第1a2期

机译：锗注入硅晶体中脉冲激光退火引起的扩展缺陷结构
2. X- ray studies: CO2 pulsed laser annealing effects on the crystallographic properties, microstructures and crystal defects of vacuumdeposited nanocrystalline ZnSe thin films [J] . Hassanien Ahmed Saeed, Akl Alaa A. CrystEngComm . 2018,第44期

机译：X射线研究：CO2脉冲激光退火对真空蒸汽稀释纳米晶型薄膜的晶体性质，微观结构和晶体缺陷的影响
3. The kinetics of point defects in low-power pulsed laser annealing of ion-implanted CdTe/CdMnTe double quantum well structures [J] . D. Sands, H. Howari Journal of Applied Physics . 2005,第8期

机译：离子注入CdTe / CdMnTe双量子阱结构的低功率脉冲激光退火中点缺陷的动力学
4. Structural properties of Si1-xGex layers grown onto crystalline or amorphous substrates by pulsed excimer laser annealing of Ge implanted silicon [C] . Florence Repplinger, CNRS, Strasbourg Cedex, Laser Materials Processing: Industrial and Microelectronics Applications . 1994

机译：Ge注入硅的脉冲准分子激光退火生长在晶体或非晶衬底上的Si1-xGex层的结构特性
5. Pulsed laser annealing of silicon structures for crystallization and dopant activation. [D] . Xu, Li. 2006

机译：硅结构的脉冲激光退火，用于结晶和掺杂剂激活。
6. Crystallization to polycrystalline silicon thin film and simultaneous inactivation of electrical defects by underwater laser annealing [O] . Emi Machida, Masahiro Horita, Yasuaki Ishikawa, -1

机译：通过水下激光退火结晶成多晶硅薄膜并同时灭活电缺陷
7. SEM CHARACTERIZATION OF EFG POLYCRYSTALLINE SILICON SOLAR CELLS REALIZED BY ION IMPLANTATION AND LASER ANNEALING WITH OVERLAPPING PULSES [O] . J. C. Muller, P. Siffert, C. T. Ho, 1982

机译：离子注入和激光退火与重叠脉冲实现EFG多晶硅太阳电池的sEm表征
8. Comparison of Pulsed Electron Beam-Annealed and Pulsed Ruby Laser-Annealed Ion-Implanted Silicon [R] . Wilson, S. R., Appleton, B. R., White, C. W., 1978

机译：脉冲电子束退火和脉冲红宝石激光退火离子注入硅的比较

Study of Extended Defect Structure Induced by Pulsed Laser Annealing in Implanted Silicon Crystals

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