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An Overview of Level Set Methods for Etching, Deposition, and Lithography Development

机译：蚀刻，沉积和光刻开发的水平集方法概述

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J. A. Sethian; D. Adalsteinsson;
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年度 1996
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1. An overview of level set methods for etching, deposition, and lithography development [J] . Sethian J.A., Adalsteinsson D. IEEE Transactions on Semiconductor Manufacturing . 1997,第1期

机译：蚀刻，沉积和光刻开发的水平集方法概述
2. A level set approach to a unified model for etching, deposition, and lithography [J] . D.Adalsteinsson, J.A.Sethian Journal of Computational Physics . 1997,第1期

机译：用于蚀刻，沉积和光刻的统一模型的水平集方法
3. A Level Set Approach to a Unified Model for Etching, Deposition, and Lithography Ⅱ: Three-Dimensional Simulations [J] . D. ADALSTEINSSON, J. A. SETHIAN Journal of Computational Physics . 1995,第2期

机译：用于蚀刻，沉积和光刻的统一模型的水平集方法Ⅱ：三维模拟
4. Computational performance of level set methods for etching, deposition, and lithography development [C] . Adalsteinsson, D., Sethian, . 1996

机译：用于蚀刻，沉积和光刻开发的水平集方法的计算性能
5. Development of level set methods for computing the semiclassical limit of Schrödinger equations with potentials [D] . Wang, Zhongming 2008

机译：开发水平集方法以计算具有势能的Schrödinger方程的半经典极限
6. Deposition of Durable Micro Copper Patterns into Glass by Combining Laser-Induced Backside Wet Etching and Laser-Induced Chemical Liquid Phase Deposition Methods [O] . Jae Min Seo, Kui-Kam Kwon, Ki Young Song, 2020

机译：通过组合激光诱导的背面湿法蚀刻和激光诱导的化学液相沉积方法将耐用的微铜图案沉积到玻璃中
7. LDRD final report : on the development of hybrid level-set/particle methods for modeling surface evolution during feature-scale etching and deposition processes. [O] . McBride, Cory L. (Elemental Technologies, American Fork, UT), Schmidt, Rodney Cannon, Musson, Lawrence Cale 2005

机译：LDRD最终报告：关于在特征尺度蚀刻和沉积过程中建模表面演变的混合水平集/粒子方法的开发。

An Overview of Level Set Methods for Etching, Deposition, and Lithography Development

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