首页> 外文OA文献 >Characterization of a Positive Chemically Amplified Photoresist for Process Control

【2h】

Characterization of a Positive Chemically Amplified Photoresist for Process Control

机译：用于过程控制的正性化学放大光刻胶的表征

页面导航

著录项
引文网络
相似文献
相关主题

著录项

作者
Nickhil Jakatdar; Xinhui Niu; Costas J. Spanos; Andy Romano; Joe Bendik; Ronald Kovacs;
展开▼
作者单位

展开▼
年度 1998
总页数
原文格式 PDF
正文语种
中图分类

相似文献

外文文献
中文文献
专利

1. Determination of coupled acid catalysis-diffusion processes in a positive-tone chemically amplified photoresist [J] . F.A.Houle, W.D.Hinsberg, M.Morrison Journal of Vacuum Science & Technology. B, Microelectronics Processing and Phenomena . 2000,第4期

机译：正化学放大光致抗蚀剂中耦合酸催化-扩散过程的确定
2. Synthesis of alicyclic polymers and characterization of chemical amplified positive photoresists having the same [J] . Liu JH, Hsieh CD, Tseng CC Journal of Applied Polymer Science . 2005,第5期

机译：脂环族聚合物的合成及其化学放大正性光刻胶的表征
3. Synthesis of alicyclic polymers and characterization of chemical amplified positive photoresists having the same [J] . Liu JH, Hsieh CD, Tseng CC Journal of Applied Polymer Science . 2005,第5期

机译：脂环族聚合物的合成及其化学放大正性光刻胶的表征
4. Characterization of a positive chemically amplified photoresist for process control [C] . Nickhil H. Jakatdar, Univ. of California/Berkeley, Berkeley, Conference on metrology, inspection, and process control for microlithography . 1998

机译：用于过程控制的化学放大正性光刻胶的表征
5. Catalyst diffusion in positive-tone chemically amplified photoresists. [D] . Stewart, Michael Dean. 2003

机译：正极化学放大光致抗蚀剂中的催化剂扩散。
6. Patterning highly ordered arrays of complex nanofeatures through EUV directed polarity switching of non chemically amplified photoresist [O] . Subrata Ghosh, V. S. V. Satyanarayana, Bulti Pramanick, -1

机译：通过非化学放大光刻胶的EUV定向极性切换对复杂纳米特征的高度有序阵列进行构图
7. Factors Affecting the Performance of Chemically Amplified DUV Positive Photoresists. [O] . James W. Thackeray, Theodore H. Fedynyshyn, Angelo A. Lamola, 1992

机译：影响化学扩增DUV阳性光致抗蚀剂性能的因素。

Characterization of a Positive Chemically Amplified Photoresist for Process Control

著录项

引文网络

相似文献

相关主题

期刊订阅