首页> 外文OA文献 >Aerial image measurement technique for Automated Reticle Defect Disposition (ARDD) in wafer fabs

【2h】

Aerial image measurement technique for Automated Reticle Defect Disposition (ARDD) in wafer fabs

机译：晶圆厂自动光罩缺陷处置（aRDD）的航空影像测量技术

页面导航

著录项
引文网络
相似文献
相关主题

著录项

作者
A. M. Zibold; R. Schmid; B. Stegemann; T. Scheruebl; W. Harnisch; Y. Kobiyama;
展开▼
作者单位

展开▼
年度 2008
总页数
原文格式 PDF
正文语种
中图分类

相似文献

外文文献
中文文献
专利

1. Multi-attribute analysis of micro-defect detection techniques suitable for automated production line of solar wafers and cells [J] . Saleem Muhammad, Al-Amri Fahad G. Renewable Power Generation, IET . 2020,第9期

机译：适用于太阳晶晶片及细胞自动化生产线的微缺陷检测技术的多属性分析
2. Fabrication of Low Defect Density 3C-SiC on SiO↓（2） Structures Using Wafer Bonding Techniques [J] . KRISHNA N. VINOD, CHRISTIAN A. ZORMAN, AZZAM A. YASSEEN Journal of Electronic Materials . 1998,第1a6期

机译：晶圆键合技术在SiO↓（2）结构上制备低缺陷密度3C-SiC
3. Fabrication of Low Defect Density 3C-SiC on SiO_2 Structures Using Wafer Bonding Techniques [J] . KRISHNA N. VINOD, CHRISTIAN A. ZORMAN, AZZAM A. YASSEEN Journal of Electronic Materials . 1998,第3期

机译：晶圆键合技术在SiO_2结构上制备低缺陷密度的3C-SiC
4. Aerial image measurement technique for Automated Reticle Defect Disposition (ARDD) in wafer fabs [C] . A.M. Zibold, R. Schmid, B. Stegemann, Conference on Photomask and Next-Generation Lithography Mask Technology XI pt.2; 20040414-20040416; Yokoham; JP . 2004

机译：晶圆厂自动掩模版缺陷处理（ARDD）的航空图像测量技术
5. Automated 3D modelling of buildings from aerial and space imagery using image understanding techniques. [D] . Kim, Taejung. 1996

机译：使用图像理解技术，根据航空和空间图像对建筑物进行自动3D建模。
6. A Semi-Automated Single Day Image Differencing Technique to Identify Animals in Aerial Imagery [O] . Pat Terletzky, Robert Douglas Ramsey -1

机译：一种半自动化的单日图像差分技术用于识别航空影像中的动物
7. An Evaluation of an Automated Detection Algorithm to Count Defects Present in X-ray Topographical Images of SiC wafers [O] . Brazil, I. C., McNally, P. J., Reilly, L. O., 2007

机译：评估SiC晶片X射线形貌图像中存在的缺陷的自动检测算法的评估

Aerial image measurement technique for Automated Reticle Defect Disposition (ARDD) in wafer fabs

著录项

引文网络

相似文献

相关主题

期刊订阅