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High-throughput mapping of shortrange spatial variations using active electrical metrology

机译：使用有源电子计量学的短距离空间变化的高通量映射

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Xu Ouyang; C. Neil Berglund; R. Fabian; W. Pease;
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年度 2002
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1. High-throughput mapping of short-range spatial variations usingactive electrical metrology [J] . Xu Ouyang, Berglund C.N., Fabian R. IEEE Transactions on Semiconductor Manufacturing . 2002,第1期

机译：使用有源电子计量学的短距离空间变化的高通量映射
2. Spatial variation of electrical conductance in electrochemically active biofilm growing on interdigitated microelectrode array [J] . Liu Panpan, Hao Wen, Mohamed Abdelrhman, Journal of power sources . 2021,第Apra15期

机译：在跨指微电极阵列上生长电化学活性生物膜电导的空间变化
3. Mapping spatial and field dependence of magnetic domain memory by soft X-ray speckle metrology [J] . Chesnel K., Nelson J., Wilcken B., Journal of synchrotron radiation . 2012,第3期

机译：通过软X射线散斑计量学映射磁畴存储器的空间和场依赖性
4. High-speed Mapping of Inter-transistor Overlay Variations Using Active Electrical Metrology [C] . X. Ouyang, C. N. Berglund, R. F. W. Pease Society of Photo-Optical Instrumentation Engineers Conference on Metrology, Inspection, and Process Control for Microlithography . 2001

机译：使用主动电气计量晶体管间覆盖变化的高速映射
5. Active electrical metrology of spatial variations in integrated circuits. [D] . Ouyang, Xu. 2001

机译：集成电路中空间变化的有源电子计量学。
6. Spatial mapping of protein abundances in the mouse brain by voxelation integrated with high-throughput liquid chromatography–mass spectrometry [O] . Vladislav A. Petyuk, Wei-Jun Qian, Mark H. Chin, 2007

机译：体素结合高通量液相色谱-质谱联用体素分析小鼠大脑中蛋白质丰度的空间作图
7. A near-field scanned microwave probe for spatially localized electrical metrology [O] . Talanov, Vladimir V., Scherz, Andre, Moreland, Robert L., 2005

机译：用于空间定位电气的近场扫描微波探头度量衡学

High-throughput mapping of shortrange spatial variations using active electrical metrology

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