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Low-Cost Large Area Processing Using Small Area Substrates - A Novel Multi-tiled Palletization Concept for MCM-D Thin Film Process

机译：使用小面积基板的低成本大面积加工-MCM-D薄膜工艺的新型多平铺货盘化概念

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Swapan K. Bhattacharya; Brian M. Gardner; Jianmin Qu; Daniel F. Baldwin; Rao R. Tummala; Contract Mda; C. P. Wong; Prof S;
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年度 1999
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1. Low-cost large area processing using small area substrates-a novel multitiled palletization concept for MCM-D thin film process [J] . Bhattacharya S.K., Gardner B.M. IEEE Transactions on Advanced Packaging . 2000,第4期

机译：使用小面积基板的低成本大面积加工-一种用于MCM-D薄膜工艺的新型多倾斜码垛概念
2. Low-cost large area processing using small area substrates-a novel multitiled palletization concept for MCM-D thin film process [J] . Bhattacharya S.K., Gardner B.M., Qu J., IEEE Transactions on Advanced Packaging . 2000,第4期

机译：使用小面积基板的低成本大面积加工-一种用于MCM-D薄膜工艺的新型多倾斜码垛概念
3. Integrating High-k Ceramic Thin Film Capacitors into Organic Substrates Via Low-Cost Solution Processing [J] . Raj P.M., Balaraman D., Abothu I.R., IEEE Transactions on Components and Packaging Technologies . 2007,第4期

机译：通过低成本溶液处理将高k陶瓷薄膜电容器集成到有机基板中
4. LARGE AREA PROCESSING USING SMALL AREA SUBSTRATES: A LOW-COST MCM-D THIN FILM PROCESSING [C] . Swapan K. Bhattacharya, Suresh K. Sitaraman, I. Charles Ume, The Pacific Rim/International, Intersociety Electronic Packaging Technical/Business Conference amp; Exhibition Jul 8-13, 2001, Kauai, Hawaii . 2001

机译：使用小面积基材进行大面积加工：低成本的MCM-D薄膜加工
5. Characterization of Indium Zinc Oxide, Indium Tin Oxide, and Molybdenum Thin Films on Flexible Glass Substrates Deposited via Roll-to-roll Sputter Deposition Processes [D] . Bezama, Christian. 2019

机译：通过轧制溅射沉积工艺沉积在柔性玻璃基板上的氧化铟锌，氧化铟锡和钼薄膜的表征
6. Mussel processing wastewater: a low-cost substrate for the production of astaxanthin by Xanthophyllomyces dendrorhous [O] . Isabel Rodríguez Amado, José Antonio Vázquez 2015

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7. An Investigation of the Material and Process Parameters for Thin-film MCM-D and MCM-L Technologies up to 100GHz [O] . Janusz Grzyb, Ivan Ruiz, Didier Cottet, 2008

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8. Mechanism and processing dependence of biaxial texture development in magnesiumoxide thin films grown by inclined-substrate deposition [R] . Chudzik, M. P., Koritala, R., Luo, L. P., 2000

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Low-Cost Large Area Processing Using Small Area Substrates - A Novel Multi-tiled Palletization Concept for MCM-D Thin Film Process

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