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Crystalline Silicon Tilting Mirrors for Optical Cross-Connect Switches

机译：光学交叉连接开关的结晶硅倾斜镜

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Dennis S. Greywall; Paul A. Busch; Flavio Pardo; Dustin W. Carr; Gregory Bogart; Hyongsok T. Soh;
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年度 2012
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1. Crystalline Silicon Tilting Mirrors for Optical Cross-Connect Switches [J] . Dennis S. Grey wall, Paul A. Busch, Flavio Pardo, Journal of Microelectromechanical Systems . 2003,第5期

机译：光学交叉连接开关的结晶硅倾斜镜
2. Design and Fabrication of Bulk Micro-machined, High Resilience, High-Q, High Tilt Angle, Low Driving Voltage, Flexure Beam Micro-mirrors on Mono-crystalline Silicon [J] . Kurhekar Anil Sudhakar, Apte P. R., Duttagupta S. P. Silicon . 2016,第1期

机译：单晶硅上的批量微加工，高回弹，高Q，高倾斜角，低驱动电压，挠性束微镜的设计与制造
3. Monolithic Fringe-Field-Activated Crystalline Silicon Tilting-Mirror Devices [J] . Dennis S. Grey wall, Chien-Shing Pai, Sang-Hyun Oh, Journal of Microelectromechanical Systems . 2003,第5期

机译：单片边缘场激活的晶体硅倾斜镜器件
4. Drift-Free, 1000G Mechanical Shock Tolerant Single-Crystal Silicon Two-Axis MEMS Tilting Mirrors in a 1000 × 1000-Port Optical Crossconnect [C] . A. Gasparyan, H. Shea, S. Arney, Optical Fiber Communications Conference . 2003

机译：无漂，1000g机械震动耐用的单晶硅双轴MEMS倾斜镜，在1000×1000端口光学交叉连接中
5. Single Crystalline Silicon Optical MEMS with Photonic Crystal Mirrors [D] . Wong, Yu-Po. 2018

机译：具有光子晶体镜的单晶硅光学MEMS
6. Optical coherence tomography endoscopic probe based on a tilted MEMS mirror [O] . Can Duan, Quentin Tanguy, Antonio Pozzi, 2016

机译：基于倾斜MEMS镜的光学相干断层扫描内窥镜探头
7. Monolithic Fringe-Field-Activated Crystalline Silicon Tilting-Mirror Devices [O] . Dennis S. Greywall, Chien-shing Pai, Sang-hyun Oh, 2013

机译：单片条纹场激活晶体硅倾斜镜装置

Crystalline Silicon Tilting Mirrors for Optical Cross-Connect Switches

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