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Statistical Aspects of Size Functions for the Description of Random Shapes. Applications to Problems of Lithography in Microelectronics

机译：大小函数的统计方面，用于描述随机形状。在微电子学中的光刻技术中的应用

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Ra Micheletti; Mauro Vasconi;
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年度 2008
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Statistical Aspects of Size Functions for the Description of Random Shapes. Applications to Problems of Lithography in Microelectronics

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