首页> 外文OA文献 >A ‘nano-battering ram ’ for measuring surface forces- Obtaining force-distance curves and sidewall stiction data with a MEMS device

【2h】

A ‘nano-battering ram ’ for measuring surface forces- Obtaining force-distance curves and sidewall stiction data with a MEMS device

机译：用于测量表面力的“纳米冲击夯”-使用MEMS装置获得力距曲线和侧壁静力数据

页面导航

著录项
引文网络
相似文献
相关主题

著录项

作者
W. Merlijn Van Spengen; Elco Bakker; Joost W. M. Frenken;
展开▼
作者单位

展开▼
年度 2008
总页数
原文格式 PDF
正文语种
中图分类

相似文献

外文文献
中文文献
专利

1. A 'nano-battering ram' for measuring surface forces: obtaining force-distance curves and sidewall stiction data with a MEMS device [J] . W. Merlijn van Spengen, Elco Bakker, Joost W. M. Frenken Journal of Micromechanics and Microengineering . 2007,第7期

机译：用于测量表面力的“纳米撞击撞锤”：使用MEMS装置获得力距曲线和侧壁静力数据
2. Friction characteristics of the curved sidewall surfaces of a rotary MEMS device in oscillating motion [J] . Jie Wu, Shao Wang, Jianmin Miao Journal of Micromechanics and Microengineering . 2009,第6期

机译：振动运动中旋转MEMS器件的弯曲侧壁表面的摩擦特性
3. Nanotribology-based novel characterization techniques for the dielectric charging failure mechanism in electrostatically actuated NEMS/MEMS devices using force-distance curve measurements [J] . Zaghloul U., Bhushan B., Papaioannou G., Journal of Colloid and Interface Science . 2012,第1期

机译：基于纳米摩擦学的新型表征技术，用于利用力距曲线测量静电驱动的NEMS / MEMS器件中的介电充电失效机理
4. FRICTION CHARACTERISTICS OF THE CURVED SIDEWALL SURFACES OF A ROTARY MEMS DEVICE IN OSCILLATING MOTION [C] . STLE/ASME international joint tribology conference . 2009

机译：振动运动中旋转MEMS装置的弯曲侧壁表面的摩擦特性
5. Understanding the effect of surface topography on stiction and friction in MEMS. [D] . Ansari, Naveed Mohammed Asgar. 2011

机译：了解表面形貌对MEMS中的静摩擦和摩擦的影响。
6. Computational wrapping: A universal method to wrap 3D-curved surfaces with nonstretchable materials for conformal devices [O] . Yu-Ki Lee, Zhonghua Xi, Young-Joo Lee, 2020

机译：计算包装：用于保形设备的3D弯曲表面用不可拉伸的材料包装的通用方法
7. Suppression of Stiction Force by All-Vapor Processes using HF, Ozone, and HMDS for MEMS Devices [O] . Yusuke Taii, Kuniyuki Kakushima, Ryuji Yokokawa, 2007

机译：使用HF，臭氧和HMDS对MEMS器件的全蒸汽过程抑制静态力

A ‘nano-battering ram ’ for measuring surface forces- Obtaining force-distance curves and sidewall stiction data with a MEMS device

著录项

引文网络

相似文献

相关主题

期刊订阅