首页> 外文OA文献 >Micron-scale friction and sliding wear of polycrystalline silicon thin structural films in ambient air

【2h】

Micron-scale friction and sliding wear of polycrystalline silicon thin structural films in ambient air

机译：周围环境中多晶硅薄膜结构薄膜的微米级摩擦和滑动磨损

页面导航

著录项
引文网络
相似文献
相关主题

著录项

作者
Daan Hein Alsem; Michael T. Dugger; Eric A. Stach; Robert O. Ritchie;
展开▼
作者单位

展开▼
年度 2008
总页数
原文格式 PDF
正文语种
中图分类

相似文献

外文文献
中文文献
专利

1. Wear mechanisms and friction parameters for sliding wear of micron-scale polysilicon sidewalls [J] . Alsem D.H., Van Der Hulst R., Stach E.A., Sensors and Actuators, A. Physical . 2010,第1期

机译：微米级多晶硅侧壁滑动磨损的磨损机理和摩擦参数
2. High-cycle fatigue and durability of polycrystalline silicon thin films in ambient air [J] . Muhlstein CL., Ritchie RO., Brown SB. Sensors and Actuators, A. Physical . 2001,第3期

机译：多晶硅薄膜在环境空气中的高循环疲劳性和耐久性
3. Friction and wear in silicon nitride-steel and cemented carbide-steel pairs in lubricated sliding [J] . Tokio Morimoto, Kenji Kamikawa Tribology International . 1996,第7期

机译：润滑滑动中氮化硅钢和硬质合金钢对的摩擦磨损
4. Tribological behavior of micron-scale polycrystalline silicon structural films in ambient air [C] . D. H. Alsem, R. van der Hulst, E. A. Stach, Conference on reliability, packaging, testing, and characterization of MEMS/MOEMS and nanodevices VIII; 20090126-28; San Jose, CA(US) . 2009

机译：微米级多晶硅结构膜在环境空气中的摩擦学行为
5. Mechanisms for fatigue and wear of polysilicon structural thin films [D] . Alsem, Daniel Henricus 2006

机译：多晶硅结构薄膜的疲劳和磨损机理
6. Realizing High Thermoelectric Performance at Ambient Temperature by Ternary Alloying in Polycrystalline Si1-x-yGexSny Thin Films with Boron Ion Implantation [O] . Ying Peng, Lei Miao, Jie Gao, -1

机译：硼离子注入多晶Si1-x-yGexSny薄膜中三元合金化在室温下实现高热电性能
7. DEVELOPMENT OF ULTRATHIN POLYCRYSTALLINE SILICON GERMANIUM FILMS AS STRUCTURAL LAYERS FOR APPLICATIONS IN NANOELECTROMECHANICAL SYSTEMS [O] . 100

机译：超细多晶硅锗薄膜作为结构层在纳米电子系统中的应用

Micron-scale friction and sliding wear of polycrystalline silicon thin structural films in ambient air

著录项

引文网络

相似文献

相关主题

期刊订阅