Integrated label-free optical biochemical sensor with a large measurement range based on an angular grating-microring resonator

摘要

We propose and design a photonic-integrated optical biochemical sensor, which comprises a microring resonator and angular gratings in a silicon-on-insulator waveguide. With the combination of the angular gratings, the measurement range of the angular grating-microring resonator-based sensor significantly increases without the restriction of a free spectral range. Optimization of the several key structural parameters is investigated to achieve favorable transmission properties. A high-quality factor of more than 1.03 Ã 105 can meet the requirements of high sensitivity and low detection limit. The simulation results on the biochemical bulk sensing show that a concentration sensitivity of more than 95.27 pm/% and detection limit of less than 0.329% can be obtained. A large measurement range of 50.2 nm is achieved by the combination of the angular gratings. The investigation on the combination of microring resonator and angular grating is a valuable exploration of the liquid and gas biomedical sensing for the ultra-large measurement range.