Investigation of polarization fatigue induced deep level transient spectroscopy in lead zirconate titanate thin film

摘要

Deep level transient spectroscopy (DLTS) in pulsed laser deposited lead zirconate titanate (Pb(Zr 0.52Ti 0.48)O 3 thin film grown on LSCO (La 0.5Sr 0.5)O 3 bottom electrode and LaAlO 3 substrate has been investigated. The transient capacitance and the deep level energy inside the energy band gap are correlated with the number of bipolar switching cycles. It was found that both of them increase with the number of switching cycles.