Thickness-dependent structural characteristics of sol-gel-derived epitaxial (PbZr)TiO3 films using inorganic zirconium salt

摘要

Sol-gel-derived epitaxial ferroelectric Pb(Zr0.52Ti0.48)O3 (PZT) thin films with varied thicknesses of 40nm-2.4μm were successfully fabricated on LaAlO3 substrates using inorganic zirconium salt as precursor. Perovskite phase formation was achieved by rapid thermal annealing at 680°C. Thickness dependence of the structural and morphological properties of these epitaxial PZT films were investigated by means of X-ray diffractometry, scanning electron microscopy and atomic force microscopy. Thicker films showed progressively better epitaxy, improved density and smaller surface roughness. Our results suggested that this inorganic based sol-gel method is suitable for growth of epitaxial PZT thick films of up to several micrometers.