High-throughput generation of hierarchical micro/nanostructures by spatial vibration-assisted diamond cutting

摘要

A spatial vibration-assisted diamond cutting (SVDC) technique for one-step processing of hierarchical micro/nanostructures at ambient conditions is proposed. By synthesizing the computer numerical control diamond machining and a 3 degree-of-freedom piezo-actuated nanovibrator, the SVDC mechanical nanomachining system with multiscale capability in both time and spatial domains is constructed.