Fiber-optic fabry-perot acoustic sensor with multilayer graphene diaphragm

摘要

A fiber-optic Fabry-Perot acoustic sensor with a similar to 100-nm-thick multilayer graphene diaphragm is reported. Acoustic testing demonstrates a pressure-induced deflection of 1100 nm/kPa and a noise equivalent acoustic signal level of similar to 60 mu Pa/Hz(1/2) at the frequency of 10 kHz. The sensor exhibits a flat frequency response from 0.2 to 22 kHz and may be useful for highly sensitive acoustic sensing.