Multi-wavelength combination source with fringe pattern transform technique to reduce the equivalent coherence length in white light interferometry

摘要

Coherence length is one of the key factors to determine the measurement resolution in white light interferometry. By the use of multi-wavelength combination source, the equivalent coherence length can be greatly reduced. In this work, the multi-wavelength combination source together with the fringe pattern transform technique is used to further reduce the equivalent coherence length and achieve a stable, high precision white light interferometric measurement.