A study of characterisation of surface generation in ultra-precision polishing using power spectrum analysis

摘要

This paper aims to characterise the surface generation in ultra-precision polishing using power spectrum analysis. The surface characteristics of mechanical polished surfaces and fluid jet polished surfaces are extracted, decomposed and analysed by power spectrum analysis of their surface roughness profiles. It is found that the surface roughness in both mechanical polishing and fluid jet polishing is mainly composed of low frequency components. With the aid of power spectrum analysis, it is also observed that the capability of machine signature removal and surface structure modification of fluid jet polishing are less effective than in mechanical polishing.