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Write-once medium with Fe-Doped BiOx thin films for blue laser recording

机译:具有Fe掺杂的BiOx薄膜的一次写入介质,用于蓝色激光记录

摘要

Fe:BiOx films are fabricated on K9 glass substrates by rf-magnetron sputtering of a BiFeO target under argon atmosphere with increasing sputtering power from 80 to 200 W at room temperature. It is found that the thin films grown at the sputtering power of 160W can be formed at an appropriate deposition rate and have an improved surface morphology. The XPS result reveals that the films investigated are comprised of Bi, Fe and O elements. A typical XRD pattern shows that no phase transition occurs in the films up to 400 degrees C. The results of the blue laser recording test demonstrate that the Fe:BiOx films have good writing sensitivity for blue laser beam (406.7 nm) and good stability after reading 10000 times. The recording marks of 200nm or less are obtained. These results indicate that the introduction of Fe into BiOx films can reduce the mark size and improve the stability of the films.
机译:Fe:BiOx膜是在氩气中,通过将BiFeO靶材进行射频磁控溅射,在室温下将溅射功率从80 W增加到200 W,在K9玻璃基板上制备的。发现以160W的溅射功率生长的薄膜可以以适当的沉积速率形成并且具有改善的表面形态。 XPS结果表明,所研究的薄膜由Bi,Fe和O元素组成。典型的XRD图谱表明,在高达400摄氏度的温度下,膜中均未发生相变。蓝色激光记录测试的结果表明,Fe:BiOx膜对蓝色激光束(406.7 nm)具有良好的写入灵敏度,并且在经过激光照射后具有良好的稳定性。阅读10000次。获得200nm或更小的记录标记。这些结果表明,将Fe引入BiOx薄膜中可以减小标记尺寸并提高薄膜的稳定性。

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