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Practical application of aerial image by principal component analysis to measure wavefront aberration of lithographic lens

机译：主成分分析在航空影像测量光刻透镜波前像差中的实际应用

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Duan LF (Duan Lifeng); Wang XZ (Wang Xiangzhao); Yan GY (Yan Guanyong); Bourov A (Bourov Anatoly);
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年度 2012
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1. Practical application of aerial image by principal component analysis to measure wavefront aberration of lithographic lens [J] . Lifeng Duan, Xiangzhao Wang, Guanyong Yan, Journal of Micro/Nanolithography, MEMS, and MOEMS . 2012,第2期

机译：主成分分析在航空影像测量中的应用
2. Wavefront aberration measurement method for a hyper-NA lithographic projection lens based on principal component analysis of an aerial image [J] . Zhu Boer, Wang Xiangzhao, Li Sikun, Applied optics . 2016,第12期

机译：基于航空影像主成分分析的超NA光刻投影镜头波前像差测量方法
3. Wavefront aberration measurement method for a hyper-NA lithographic projection lens based on principal component analysis of an aerial image [J] . Zhu Boer, Wang Xiangzhao, Li Sikun, Applied optics . 2016,第12期

机译：基于航空影像主成分分析的超NA光刻投影镜头波前像差测量方法
4. Experimental Determination of Aberration in Lithographic lens by Aerial Image [C] . Lifeng Duan, Xiangzhao Wang, Guanyong Yan, Optical fabrication, testing, and metrology IV . 2011

机译：航拍实验确定平版镜头像差的实验
5. Principal Component Analysis and Spatial Regression Techniques to Model and Map Corn and Soybean Yield Variability with Radiometrically Calibrated Multitemporal and Multispectral Digital Aerial Imagery [D] . Pritsolas, Joshua. 2018

机译：主成分分析和空间回归技术，通过辐射校准的多时相和多光谱数字航空影像对玉米和大豆的产量变异性进行建模和映射
6. Measurement of wavefront aberrations and lens deformation in the accommodated eye with optical coherence tomography-equipped wavefront system [O] . Ji C. He, Jianhua Wang -1

机译：配备光学相干层析成像的波前系统测量被检眼中波前像差和晶状体变形
7. Practical application of aerial image by principal component analysis to measure wavefront aberration of lithographic lens [O] . Duan LF (Duan Lifeng), Wang XZ (Wang Xiangzhao), Yan GY (Yan Guanyong), 2012

机译：主成分分析在航空影像测量光刻透镜波前像差中的实际应用
8. Nuclear Forensics Applications of Principal Component Analysis on Micro X-ray Fluorescence Images. [R] . Castro, S. T. 2016

机译：主要成分分析的核取证在微X射线荧光图像中的应用。

Practical application of aerial image by principal component analysis to measure wavefront aberration of lithographic lens

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