On-chip integrated silicon bulk-micromachined soil moisture sensor with electronics and bus interface

摘要

This paper presents an on-chip silicon bulkmicromachined Soil Moisture Sensor (SMS) for irrigation control in greenhouses. The system-on-a-chip includes the SMS,readout electronics, self-test, calibration facilities and a digital bus interface for external data transmission. Moreover, thislow-cost device can be applied in several locations (e. g. per each plant root), and networked together with the 1-wire bus.The heat-pulse technique is used (for measuring the maximum temperature on a distant point) to determine the volumetricheat capacity and hence the water content of a porous media, such as soil. In order to validate this method, experimental results were achieved with a macrosensor based on the heat-pulse and capacitance methods. The capacitance method relates the volumetric water content with the capacitance change (dielectric properties) of a probe, inserted in the soil. Several tests were performed for different type of soils andwater contents. These results are compared with the measurements achieved using the conventional thermogravimetric method.