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Tuning of the surface plasmon resonance in TiO2/Au thin films grown by magnetron sputtering : the effect of thermal annealing

机译:磁控溅射TiO2 / Au薄膜表面等离子体共振的调谐:热退火的影响。

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摘要

Nanocomposites consisting of a dielectric matrix, such as TiO2, with embedded noble metal nanoparticles (NPs) possess specific optical properties due to the surface plasmon resonance (SPR) effect, interesting for several applications. The aim of this work is to demonstrate that these properties are sensitive to the nanostructure of magnetron-sputtered TiO2/Au thin films, which canbe tuned by annealing. We study the role of the shape and size distribution of the NPs, as well as the influence of the crystallinity and phase composition of the host matrix on the optical response of the films. All these characteristics can be modified by vacuum annealing treatments of the deposited films. A theoretical interpretation and modeling of the experimental results obtained is presented. The model involves a modified Maxwell-Garnett approach for the effective dielectricfunction of the composite (describing the SPR effect) and the transfer matrix formalism formultilayer optics. Input data are based on the experimental information obtained from the detailed structural characterization of the films. It is shown that the annealing treatments can be used for controlling the optical properties of the composite films, making them attractive for decorativecoatings.
机译:由电介质基质(例如TiO2)和嵌入的贵金属纳米颗粒(NPs)组成的纳米复合材料由于表面等离振子共振(SPR)效应而具有特定的光学特性,这在几种应用中引起了人们的兴趣。这项工作的目的是证明这些特性对磁控溅射TiO2 / Au薄膜的纳米结构敏感,可以通过退火对其进行调谐。我们研究了纳米粒子的形状和大小分布的作用,以及基质的结晶度和相组成对薄膜光学响应的​​影响。所有这些特性都可以通过对沉积膜进行真空退火处理来改变。提出了对实验结果的理论解释和建模。该模型包括用于复合材料有效介电功能(描述SPR效应)的改进的Maxwell-Garnett方法和用于多层光学器件的传递矩阵形式。输入数据基于从薄膜的详细结构表征获得的实验信息。结果表明,退火处理可用于控制复合膜的光学性能,使其对装饰涂层具有吸引力。

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