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Friction and wear performance of HFCVD nanocrystalline diamond coated silicon nitride ceramics

机译:HFCVD纳米晶金刚石涂层氮化硅陶瓷的摩擦磨损性能

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摘要

Silicon nitride (Si3N4) ceramics were selected as substrates due to their thermal and chemical compatibility to diamond that ensure the adequate NCD adhesion for mechanical purposes. NCD deposition was performed by hot-filament chemical vapour method (HFCVD) using Ar/H2/CH4 gas mixtures. The tribological assessment of homologous pairs of NCD films was accomplished using reciprocating ball-on-flat tests using NCD coated Si3N4 plates and balls. The friction evolution is characterized by an initial running-in regime with a sharp peak up to 0.70, shortly followed by a steady-state regime identified by very low friction coefficients values (0.02–0.03). The threshold load prior to delamination depends on the starting surface roughness of the substrates and attains a value of ¨40 N. In terms of wear performance, the NCD films reveal a mild wear regime (K~10-7 mm3 N-1 m-1) for self-mated dry sliding conditions.
机译:选择氮化硅(Si3N4)陶瓷作为基材,是因为它们与金刚石具有热和化学相容性,可确保足够的NCD附着力以实现机械用途。 NCD沉积是通过热丝化学气相法(HFCVD)使用Ar / H2 / CH4气体混合物进行的。使用往复球在平板上进行NCD涂覆的Si3N4板和球进行平板试验,完成了NCD膜对的摩擦学评估。摩擦演变的特征是初始磨合状态,其尖峰最高可达0.70,随后不久便是由非常低的摩擦系数值(0.02–0.03)确定的稳态状态。分层之前的阈值载荷取决于基材的初始表面粗糙度,并且达到40 N的值。就耐磨性能而言,NCD膜显示出轻微的磨损状态(K〜10-7 mm3 N-1 m- 1)适用于自配合的干滑条件。

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