Humidity sensing properties of TiO2-SnO2 thin films fabricated using spin coating technique

摘要

Titanium dioxide thin films were deposited on SnO2 substrates using spin coating technique. The humidity sensing properties were investigated. The bi-layer showed linear variation ofudcapacitance at lower relative humidity and exhibited saturating values at higher relative humidity. The dielectric constant and the capacitance of the sample showed linear variation with temperature.