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Degradation in AlGaN/GaN heterojunction field effect transistors upon electrical stress: Effects of field and temperature

机译:电应力对AlGaN / GaN异质结场效应晶体管的降解:场和温度的影响

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摘要

AlGaN/GaN heterojunction field effect transistors (HFETs) with 2 μm gate length were subjected to on-state-high-field (high drain bias and drain current) and reverse-gate-bias (no drain currentand reverse gate bias) stress at room and elevated temperatures for up to 10 h. The resulting degradation of the HFETs was studied by direct current and uniquely phase noise before and after stress. A series of drain and gate voltages was applied during the on-state-high-field and reverse-gate-bias stress conditions, respectively, to examine the effect of electric field on degradation of the HFET devices passivated with SiNx. The degradation behaviors under these two types of stress conditions were analyzed and compared. In order to isolate the effect of self-heating/temperature on device degradation, stress experiments were conducted at base plate temperatures up to 150 °C. It was found that the electric field induced by reverse-gate-bias mainly generated trap(s), most likely in the AlGaN barrier, which initially were manifested as generation-recombination (G-R) peak(s) in the phase noise spectra near 103 Hz. Meanwhileelectric field induced by on-state-high-field stress mainly generated hot-electron and hot-phonon effects, which result in a nearly frequency independent increase of noise spectra. The external base plate temperatures promote trap generation as evidenced by increased G-R peak intensities.
机译:在室温下,对栅极长度为2μm的AlGaN / GaN异质结场效应晶体管(HFET)进行导通状态-高场(高漏极偏置和漏极电流)和反向栅极偏置(无漏极电流和反向栅极偏置)的应力高温下长达10小时。通过在应力之前和之后的直流电和独特的相位噪声研究了HFET的最终退化。分别在导通状态高场和反向栅极偏置应力条件下施加了一系列漏极和栅极电压,以检查电场对被SiNx钝化的HFET器件的退化的影响。分析和比较了这两种应力条件下的降解行为。为了隔离自加热/温度对器件退化的影响,在高达150 C的基板温度下进行了应力实验。结果发现,反向栅极偏置产生的电场主要在AlGaN势垒中产生陷阱,最初在103附近的相位噪声谱中表现为产生复合峰(GR)。赫兹。同时,高通态应力引起的电场主要产生热电子和热声子效应,从而导致噪声频谱几乎与频率无关。外部基板温度促进陷阱的产生,如G-R峰强度增加所证明。

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