Deep level defects in n-type GaN grown by molecular beam epitaxy

摘要

Deep-level transient spectroscopy has been used to characterize electronic defects in n-type GaN grown by reactive molecular-beam epitaxy. Five deep-level electronic defects were observed, with activation energiesE1=0.234±0.006, E2=0.578±0.006, E3=0.657±0.031, E4=0.961±0.026, and E5=0.240±0.012 eV. Among these, the levels labeled E1, E2, and E3are interpreted as corresponding to deep levels previously reported in n-GaN grown by both hydride vapor-phase epitaxy and metal organic chemical vapor deposition. Levels E4 and E5do not correspond to any previously reported defect levels, and are characterized for the first time in our studies.