Large pyroelectric effect in undoped epitaxial Pb(Zr,Ti)O3 thin films on SrTiO3 substrates

摘要

We have studied pyroelectric and ferroelectric properties of Pb(Zr,Ti)O3thin filmsgrown epitaxially on SrTiO3(001) substrates by rf magnetron sputtering. The pyroelectric coefficient was measured in the temperature range from 280 to 370 K using the Byer–Roundy method. Values as high as 48 nC/cm2 K have been obtained at 300 K. The PZTthin films exhibited a remanent polarization of 45–58 μC/cm2. The improved pyroelectric coefficient was attributed to a high crystalline quality of the films, as revealed by x-ray diffraction that showed only (001)-oriented perovskitePZT phase and a ω-rocking curve full width at half maximum value as low as 4.2 arc min for 300 nm thick films.