Experimental considerations for fabrication of radio frequency micro and nano electro mechanical systems switches

摘要

Radio Frequency Micro-Electro-Mechanical Systems (RF MEMS) is the “enabling” technology that can offer reduction in weight, volume, cost and power consumption with improved functionality. RF MEMS technology can be used for reconfigurable front-end communication systems. The use of the same piece of hardware for various standards is becoming more and more imperative in telecommunication systems. Moreover, the future RF MEMS combined with CMOS technology can bring unprecedented advantages with significant reduction of the system size, weight and cost. Ultimately, the Nano-Electro-Mechanical Systems (NEMS) technology can lead to further improvements with the notable increase in the device operational speed. The research conducted for this thesis includes:-•The development of the full six mask all metal fabrication process of the RF MEMS switches at UNSW. This includes a new process for the final release of the RF MEMS switch structures. •The design, simulation, fabrication and measurement of novel RF MEMS switches for 0 to 40 GHz bandwidth, with good RF performance.•The development of a new simplified closed form analytical method for the calculation of spring constant of cantilever beams.•The development of the four mask all metal surface micromachined fabrication process with high resolution of 20nm gap CPW structures for RF NEMS switches. •The design, simulation, fabrication and measurement of RF NEMS switch for 0 to 40 GHz bandwidth.