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Novel effects on the fracture strength of poly-crystalline silicon wafers

机译:对多晶硅晶片断裂强度的新影响

摘要

Nowadays, silicon wafers are widely used in a number of areas, in particular in the semiconducting and photovoltaic industries. In solar cells, large-grained poly-crystalline silicon wafers have gained popularity due to their low-cost manufacturing which involves wire-cutting of ingots. However, this process introduces surface defects, which, added to the brittleness of silicon, lead to fracture in manufacturing, transportation, and exploitation. The silicon wafers in solar cells are subjected to harsh working environment when used on house and car roofs, since wind blasting and car racing introduce vibrations and the changing seasonal and daily temperature introduce thermal stresses. All this affects the resistance of silicon wafers and ultimately solar cells, to fracture. Based on the above, this thesis aims to determine the fracture strength of commercially available large-grainedpoly-crystalline silicon wafers, as well as their fatigue resistance.On this project, a combination of experimental, analytical and numerical approaches has been applied to resolve the issue of fracture under quasi-static and cyclic loadings. The flexural strength has been elucidated for both raw and polished wafers by means of ball-on-ring flexural tests, and the range of fatigue stresses has been ascertained. Mechanical and thermal fatigue tests have been conducted on initially indented specimens by means of Vickers indentation, to simulate surface defects. The mechanical fatigue has been carried out by ball-on-ring test setting with a BOSE equipment of 3kN loading cell, and the number of cycles at crack initiation has been recorded. Optical microscopy and SEM have been employed to reveal the crack propagation and damage mechanism. Somethermal fatigue tests have also been conducted, to assess the resistance of silicon wafers to changes in the thermal environment. Based on the experimental work and a comparison with the available reports in the literature, this thesis draws conclusions on the difference between the fracture strength and fatigue resistance of single-crystal and poly-crystalline silicon wafers under flexural loading conditions. Recommendations are also given on possible future studies on fatigue of poly-crystalline silicon wafers.
机译:如今,硅晶片已广泛用于许多领域,特别是在半导体和光伏行业。在太阳能电池中,大颗粒多晶硅晶片因其低成本制造而受到欢迎,该制造涉及锭的线切割。但是,此过程会引入表面缺陷,这些缺陷会增加硅的脆性,从而导致制造,运输和开发过程中发生断裂。太阳能电池中的硅晶片在房屋和汽车屋顶上使用时会经受恶劣的工作环境,这是因为喷风和赛车会引起振动,而不断变化的季节性和日常温度也会引起热应力。所有这些都会影响硅晶片和最终太阳能电池的抗断裂性。在此基础上,本论文旨在确定市售大晶粒多晶硅片的断裂强度及其耐疲劳性。在本项目中,通过实验,分析和数值方法相结合的方法来解决该问题。准静态和周期性载荷作用下的断裂问题。借助于圆环上的弯曲试验已经阐明了原始晶片和抛光晶片的弯曲强度,并且确定了疲劳应力的范围。已经通过维氏压痕对最初压痕的样品进行了机械和热疲劳测试,以模拟表面缺陷。机械疲劳已通过使用3kN称重传感器的BOSE设备通过环上球试验设置进行,并记录了裂纹萌生的循环次数。光学显微镜和扫描电镜已被用来揭示裂纹的扩展和破坏机理。还进行了一些热疲劳测试,以评估硅晶片对热环境变化的抵抗力。基于实验工作,并与文献报道进行比较,本文得出了单晶和多晶硅晶片在弯曲载荷条件下的断裂强度与疲劳强度之间的差异的结论。还提出了有关多晶硅晶片疲劳的未来可能研究的建议。

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