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An automated micro-grinding system for the fabrication of precision micro-scale profiles

机译:用于制造精密微米级轮廓的自动化微研磨系统

摘要

Production of micro-scale components is an important emergent field. One underdeveloped area is the production of micro-scale 3D surfaces, which has important applications in micro-optics and fibre optic sensors. One particular application is the production of micro-lenses. With scales of less than 200 μm these lenses can improve light coupling efficiencies in micro-optic systems. However, current lens production techniques have limitations in accuracy and versatility. Creating these surfaces through mechanical micro-grinding has the potential to improve the precision and variety of profiles that can be produced, thus improving transmission efficiencies and leading to new applications.This work presents a novel micro-grinding method for the production of microscale asymmetric, symmetric and axisymmetric curved components from brittle materialssuch as glasses. A specialised micro-grinding machine and machining systemhas been designed, constructed and successfully tested and is presented here. Thissystem is capable of producing complex profiles directly on the tips of optical fibreworkpieces. A five degree of freedom centring system is presented that can align androtate these workpieces about a precision axis, enabling axisymmetric grinding. Amachine vision system, utilising a microscope lens system and sub-pixel localisationtechniques, is used to provide feedback for the process, image processing techniquesare presented which are shown to have a sensing resolution of 300 nm. Using thesesystems, workpieces are centred to within 500 nm. Tools are mounted on nanometreprecise motion stages and motion and infeed are controlled. Tooling configurationswith flat and tangential grinding surfaces are presented along with control and pathgeneration algorithms. The capabilities and shortcomings of each are presentedalong with methods to predict appropriate feed rates based on experimental data.Both asymmetric and axisymmetric flat and curved micro-profiles have beenproduced on the tips of optical fibres using this system. These are presented andanalysed and show that the system, as described, is capable of producing high qualitymicro-scale components with submicron dimensional accuracy and nanometricsurface quality. The advantages of this technique are compared with other processesand discussed. Further development of the system and technique are also considered.
机译:微型零件的生产是重要的新兴领域。一个尚待开发的领域是微型3D表面的生产,它在微光学和光纤传感器中具有重要的应用。一种特定的应用是微透镜的生产。这些透镜的尺寸小于200μm,可以提高微光学系统中的光耦合效率。但是,当前的镜片生产技术在准确性和多功能性方面存在局限性。通过机械微研磨创建这些表面具有提高可生产轮廓的精度和多样性的潜力,从而提高了传输效率并带来了新的应用。这项工作提出了一种新颖的微研磨方法,用于生产微米级不对称,由玻璃等脆性材料制成的对称和轴对称弯曲组件。已经设计,构造并成功测试了专用的微磨床和加工系统,并在此处介绍。该系统能够直接在光纤工件的尖端上产生复杂的轮廓。提出了一种五自由度对中系统,该系统可以使这些工件围绕精密轴对齐和旋转,从而实现轴对称磨削。利用显微镜透镜系统和亚像素定位技术的机器视觉系统用于为该过程提供反馈,并提出了图像处理技术,该技术显示具有300 nm的感测分辨率。使用这些系统,将工件定心在500 nm以内。将工具安装在纳米级精度的运动平台上,并控制运动和进给。介绍了具有平面和切向磨削表面的刀具配置以及控制和路径生成算法。同时介绍了每种方法的功能和缺点,以及根据实验数据预测合适进给速度的方法。使用该系统,在光纤尖端均产生了不对称和轴对称的扁平和弯曲微轮廓。对这些进行了介绍和分析,结果表明,所描述的系统能够生产具有亚微米尺寸精度和纳米表面质量的高质量微型组件。将该技术的优点与其他过程进行了比较并进行了讨论。还考虑了系统和技术的进一步发展。

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