Wireless Applications of Radio Frequency Micro-Electro-Mechanical Systems

摘要

With mass proliferation of wireless communication technologies, there is a continuous demand on fast data transmission rate and efficient use of frequency spectrum. As a result, reconfigurable systems are of significant importance and research is being conducted in numerous universities.The purpose of this research is to develop novel RF MEMS based reconfigurable wireless systems. By utilizing the RF MEMS switches as a basic building block, this thesis focus on developing a unique design technique for the design and development of RF MEMS delay line phase shifter, frequency reconfigurable antennas and pattern reconfigurable antennas. This thesis work is divided into four parts:1.Investigation and development of nano-electro-mechanical systems (NEMS) based 3-bit phase shifter. Analyzing the slow wave structure to further reduce the size of delay line phase shifter.2.Development of frequency reconfigurable antennas to compete with broadband and multi-band antennas. Two novel MEMS-loaded frequency reconfigurable antennas were designed with spectrum switchable between WPAN band (57 to 66 GHz) and the whole E-band (71 to 86 GHz).3.Investigation of microstrip-to-coplanar striplines (CPS) transition balun used for antennas to explain the inherent phase delay of this type of structure. Based on the discovery, a pattern reconfigurable quasi-Yagi antenna was designed. The antenna exhibits excellent RF performance, compact size and switchable end-fire radiation pattern with the goal to replacing existing phased array antennas. It has the full functionality of a multi-antenna phased array plus phase shifting network while its size is same as a fixed single Yagi antenna.4.Development of full seven masks all metal fabrication process of the RF MEMS integrated reconfigurable antennas. The fabrication processes are optimized based on Australian National Fabrication Facility (ANFF) New South Wales node’s equipment.