Impact of open de-ionized water thin film laminar immersion on the liquid immersed ablation threshold and ablation rate of features machined by KrF excimer laser ablation of bisphenol A polycarbonate.

摘要

This article was accepted for publication in the journal, Optics and Lasers in Engineering [© Elsevier] and the definitive version is available from: http://dx.doi.org/10.1016/j.optlaseng.2009.06.009