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Determination of the Thickness and Optical Constants of ZrO2 by Spectroscopic Ellipsometry and Spectrophotometric Method

机译：椭圆光谱法和分光光度法测定ZrO2的厚度和光学常数。

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Yusoh R.; Horprathum M.; Eiamchai P.; Chanyawadee S.; Aiempanakit K.;
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年度 2011
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4. Determination of the Thickness and Optical Constants of ZrO2 by Spectroscopic Ellipsometry and Spectrophotometric Method [C] . R. Yusoh, M. Horprathum, P. Eiamchai International Science, Social Science, Engineering and Energy Conference . 2013

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机译：椭偏光谱法测定ZrO2薄膜的光学和物理性能

Determination of the Thickness and Optical Constants of ZrO2 by Spectroscopic Ellipsometry and Spectrophotometric Method

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