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Fine-Tuning of Relative Fraction of Amorphous and Crystalline Phases in Hydrogenated Silicon Prepared by PE-CVD Method

机译：PE-CVD法制备氢化硅中非晶相和晶相的相对比的精细调节

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Funde A.M.; Waman V.S.; Kamble M.M.; Pramod M.R.; Gore S.P.; Roze G.R.; Sathe V.G.; Gosavi S.W.; Jadkar S.R.;
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Fine-Tuning of Relative Fraction of Amorphous and Crystalline Phases in Hydrogenated Silicon Prepared by PE-CVD Method

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