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Simulation of Perforated Diaphragms Employed Piezoresistive Pressure Sensor for Sensitivity Enhancement and Validation with Modified Analytical Model

机译：压敏电阻传感器的多孔膜片用于灵敏度增强和验证的改进分析模型

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Rajavelu M.; Sivakumar D.; Daniel R. Joseph; Sumangala K.;
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年度 2012
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1. Perforated diaphragms employed piezoresistive MEMS pressure sensor for sensitivity enhancement in gas flow measurement [J] . M. Rajavelu, D. Sivakumar, R. Joseph Daniel, Flow Measurement and Instrumentation . 2014,第Null期

机译：多孔膜片采用压阻MEMS压力传感器，可提高气体流量测量的灵敏度
2. Analytical modeling and simulation of MEMS piezoresistive pressure sensors with a square silicon carbide diaphragm as the primary sensing element under different loading conditions [J] . Sumit Kumar Jindal, Sai Pratyusha Magam, Maitreyi Shaklya Journal of Computational Electronics . 2018,第4期

机译：以方形碳化硅膜片为主要传感元件的MEMS压阻式压力传感器的分析建模和仿真
3. Analytical modeling to estimate the sensitivity of MEMS technology-based piezoresistive pressure sensor [J] . Belwanshi Vinod Journal of Computational Electronics . 2021,第1期

机译：分析模型来估算MEMS技术压阻式压力传感器的灵敏度
4. Simulation of Perforated Diaphragms Employed Piezoresistive Pressure Sensor for Sensitivity Enhancement and Validation with Modified Analytical Model [C] . M.Rajavelu, D.Sivakumar, RJoseph Daniel International Conference on Modelling Optimization and Computing . 2013

机译：穿孔隔膜的模拟采用压阻式压力传感器，用于改进分析模型的灵敏度增强和验证
5. Design, simulation and fabrication of piezoresistive pressure sensors on flexible substrates. [D] . Shamanna, Vinayak K. 2005

机译：在柔性基板上设计，模拟和制造压阻式压力传感器。
6. Development Fabrication and Characterization of Hydrogel Based Piezoresistive Pressure Sensors with Perforated Diaphragms [O] . M.P. Orthner, Sebastian Buetefisch, J. Magda, -1

机译：与穿孔横膈膜制作和水凝胶的发展表征基于压阻式压力传感器
7. Development, fabrication, and characterization of hydrogel based piezoresistive pressure sensors with perforated diaphragms [O] . M.P. Orthner, Sebastian Buetefisch, J. Magda, 2010

机译：具有多孔膜片的水凝胶基压阻式压力传感器的开发，制造和表征
8. Integrated CMOS circuits for piezoresistive pressure sensors with emphasis on thermal sensitivity shift compensation [R] . Gakkestad, J. 1993

机译：用于压阻式压力传感器的集成CmOs电路，重点是热灵敏度偏移补偿

Simulation of Perforated Diaphragms Employed Piezoresistive Pressure Sensor for Sensitivity Enhancement and Validation with Modified Analytical Model

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