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High contrast 3D imaging of surfaces near the wavelength limit using tabletop EUV ptychography

机译：使用台式EUV指纹图谱对接近波长极限的表面进行高对比度3D成像

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Zhang Bosheng; Gardner Dennis F.; Seaberg Matthew D.; Shanblatt Elisabeth R.; Kapteyn Henry C.; Murnane Margaret M.; Adams Daniel E.;
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1. High contrast 3D imaging of surfaces near the wavelength limit using tabletop EUV ptychography [J] . Zhang Bosheng, Gardner Dennis F., Seaberg Matthew D., Ultramicroscopy . 2015,第Null期

机译：使用台式EUV指纹图谱对接近波长极限的表面进行高对比度3D成像
2. Interplay of the tipsample junction stability and image contrast reversal on a Cu(111) surface revealed by the 3D force field [J] . Such B., Glatzel T., Kawai S., Nanotechnology . 2012,第4期

机译：由3D力场揭示的Cu（111）表面上的尖端样品接合处稳定性和图像对比度反转之间的相互作用
3. Mc3D: A three-dimensional Monte Carlo system simulating image contrast in surface analytical scanning electron microscopy I—Object-oriented software design and tests [J] . Scanning . 1998,第6期

机译：Mc3D：三维蒙特卡洛系统，用于在表面分析扫描电子显微镜I中模拟图像对比度-面向对象的软件设计和测试
4. Spectroscopic imaging of buried layers in 2+1D via tabletop ptychography with high-harmonic EUV illumination [C] . Dennis F. Gardner, Christina L. Porter, Elisabeth R. Shanblatt, Conference on metrology, inspection, and process control for microlithography XXX . 2016

机译：借助高谐波EUV照明通过桌面刻印术以2 + 1D方式对掩埋层进行光谱成像
5. Closing the gap to the diffraction limit: Near wavelength limited tabletop soft x-ray coherent diffractive imaging [D] . Sandberg, Richard Lunt 2009

机译：缩小衍射极限的距离：近波长受限的台式软X射线相干衍射成像
6. High Contrast Reflectance Imaging of Simulated Lesions on Tooth Occlusal Surfaces at Near-IR Wavelengths [O] . William A. Fried, Daniel Fried, Kenneth H. Chan, -1

机译：近红外波长下牙齿咬合面上模拟病变的高对比度反射成像
7. High contrast reflectance imaging of simulated lesions on tooth occlusal surfaces at near-IR wavelengths [O] . William A. Fried, Daniel Fried, Kenneth H. Chan, 2013

机译：近红外波长牙咬合表面上模拟病变的高对比度反射率成像

High contrast 3D imaging of surfaces near the wavelength limit using tabletop EUV ptychography

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