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Influence of substrate temperature and deposition rate on structural and mechanical properties of shape memory NiTi films

机译：衬底温度和沉积速率对形状记忆NiTi膜结构和力学性能的影响

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Sharma Sudhir Kumar; Vijaya H.S.; Mohan S.;
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Influence of substrate temperature and deposition rate on structural and mechanical properties of shape memory NiTi films

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