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Effect of 3-mercaptopropyltrimethoxysilane on Surface Finish and Material Removal Rate in Chemical Mechanical Polishing

机译：3-巯基丙基三甲氧基硅烷对化学机械抛光中表面光洁度和材料去除率的影响

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Sivanandini M.; Dhami Sukhdeep S.; Pabla B.S.; Gupta M.K.;
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年度 2014
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3. Abrasive rolling effects on material removal and surface finish in chemical mechanical polishing analyzed by molecular dynamics simulation [J] . Una Si, Dan Guo, Jianbin Luo, Journal of Applied Physics . 2011,第8PTa2期

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4. Effect of 3-mercaptopropyltrimethoxysilane on Surface Finish and Material Removal Rate inChemical Mechanical Polishing [C] . M Sivanandini, Sukhdeep S Dhami, B S Pabla International Conference on Materials Processing and Characterisation . 2014

机译：3-巯基丙基三甲氧基硅烷对表面光洁度和材料去除率的影响
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Effect of 3-mercaptopropyltrimethoxysilane on Surface Finish and Material Removal Rate in Chemical Mechanical Polishing

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