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Single layer graphene film by ethanol chemical vapor deposition: Highly efficient growth and clean transfer method

机译:乙醇化学气相沉积单层石墨烯薄膜:高效生长和清洁转移方法

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摘要

The choice of ethanol (C2H5OH) as carbon source in the Chemical Vapor Deposition (CVD)udof graphene on copper foils can be considered as an attractive alternative among theudcommonly used hydrocarbons, such as methane (CH4) [1]. Ethanol, a safe, low cost and easyudhandling liquid precursor, offers fast and efficient growth kinetics with the synthesis of fullyformedudgraphene films in just few seconds [2]. In previous studies of graphene growth fromudethanol, various research groups explored temperature ranges lower than 1000 °C, usuallyudreported for methane-assisted CVD. In particular, the 650–850 °C and 900 °C ranges wereudinvestigated, respectively for 5 and 30 min growth time [3, 4]. Recently, our group reportedudthe growth of highly-crystalline, few-layer graphene by ethanol-CVD in hydrogen flow (1–ud100 sccm) at high temperatures (1000–1070 °C) using growth times typical of CH4-assistedudsynthesis (10–30 min) [5]. Furthermore, a synthesis time between 20 and 60 s in the sameudconditions was explored too. In such fast growth we demonstrated that fully-formed grapheneudfilms can be grown by exposing copper foils to a low partial pressure of ethanol (up to 2 Pa)udin just 20 s [6] and we proposed that the rapid growth is related to an increase of the Cuudcatalyst efficiency due weak oxidizing nature of ethanol. Thus, the employment of such liquidudprecursor, in small concentrations, together with a reduced time of growth and very lowudpressure leads to highly efficient graphene synthesis. By this way, the complete coverage of audcopper catalyst surface with high spatial uniformity can be obtained in a considerably lowerudtime than when using methane.
机译:在铜箔上的化学气相沉积(CVD) udof石墨烯中选择乙醇(C2H5OH)作为碳源可以被认为是 u的常用烃(例如甲烷(CH4))中有吸引力的选择[1]。乙醇是一种安全,低成本且易于处理的液体前体,可在短短几秒钟内合成出完整的 udgraphene薄膜,从而提供快速有效的生长动力学[2]。在以前的从乙醇中石墨烯生长的研究中,各个研究小组探索了低于1000°C的温度范围,该温度范围通常未报道为甲烷辅助CVD。特别是,分别研究了650–850°C和900°C的范围,分别生长了5分钟和30分钟[3,4]。最近,我们的小组报告了使用高温的CH4辅助生长时间,在高温(1000–1070°C)的氢气流(1– ud100 sccm)中通过乙醇化学气相沉积法生长了高度结晶的多层石墨烯 udsynthesis(10-30分钟)[5]。此外,还探索了在相同条件下20至60 s的合成时间。在如此快速的增长中,我们证明了通过将铜箔暴露于低的乙醇分压(高达2 Pa) udin仅20 s即可生长出完整的石墨烯 ud膜[6],并且我们认为快速增长与由于乙醇的弱氧化性而提高了铜催化剂的效率。因此,采用低浓度的这种液体/前驱物,以及减少的生长时间和非常低的/超压,导致高效的石墨烯合成。通过这种方式,与使用甲烷相比,可以在相当短的时间内获得具有高空间均匀性的铜催化剂表面的完全覆盖。

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