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Comparison of 2 V organic thin-film transistors fabricated on free-standing commercial PEN foils

机译:在独立式商用PEN箔上制造的2 V有机薄膜晶体管的比较

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摘要

The large-area, roll-to-roll (R2R) fabrication of organic thin-film circuits on plastic foils demands low-cost manufacturing and the integration of devices onto flexible plastic substrates. We have developed a fully dry process [1] to fabricate low-voltage organic thin-film transistors (OTFTs) with 10-nm thick dielectric amenable to R2R processing. Two commercially available polyethylene naphthalate (PEN) plastic foils (DuPont Teijin [2]) were compared for use as possible flexible substrates. Teonex Q65FA features an adhesive layer on the bottom side to prevent its slippage during the R2R process, while Optfine PQA1 includes a planarisation layer on the top (device) side. The PEN films were pre-annealed at 160°C for 24 hours prior to OTFT fabrication. 160°C is the maximum temperature used in our OTFT fabrication process and the pre-annealing should mitigate the layer-to-layer misalignment during the OTFT fabrication. Teonex Q65FA remained flat after the pre-annealing step, while the radius of curvature of Optfine PQA1 changed from 17 cm to 1.5 cm after the anneal. Consequently, we fabricated Al/AlOx/C8PA/DNTT/Au and Al/AlOx/DNTT/Au OTFTs on non-annealed Optfine and pre-annealed Teonex foils. Dinaphthothienothiophene (DNTT) was chosen due to its excellent air-stability and the addition of n-octylphosphonic acid (C8PA) improves its growth. 15 nm of DNTT was deposited at room temperature at rates of 0.4 Å/s and 0.6 Å/s on the Teonex and Optfine, respectively. The initial OTFT performance was evaluated by measuring the transfer characteristics between 0 and −2 V and extracting the field-effect mobility, threshold voltage, subthreshold slope, etc. Bias stress was performed approximately one week after the initial measurements at a gate voltage of −2 V while the source and drain were grounded. Referring to Table 1, one week of storage in vacuum between the initial and bias stress measurements, led to a reduction in OTFT threshold voltage and an increase in the mobility and the OFF-current. Figure 1 shows the as-fabricated OTFT parameters extracted from transfer characteristics measured at a drain voltage of −2 V. For both PEN substrates tested, the inclusion of the C8PA monolayer increases field-effect mobility, ON-current and ON/OFF-current ratio and reduces subthreshold slope and OFF-current. The substrates affect OTFT performance in a mixed way. Comparing OTFTs with C8PA monolayer Teonex PEN has a slightly lower subthreshold slope and OFF-current than the Optfine PEN film. However, the Optfine film exhibits about a factor of three higher field-effect mobility (0.14 cm2/Vs) and about an order of magnitude higher ON-current. The OTFTs on Optfine PEN substrate also appear to remain more stable after the application of bias stress in terms of mobility, even though their threshold voltage at the beginning of the bias stress was  −0.4 V lower than that of OTFTs fabricated on Teonex PEN. In conclusion, Teonex PEN was found to be easier to handle, since it remained flat upon heating at 160°C. However, the AlOx/C8PA transistors exhibited about a factor of three lower field-effect mobility when compared to Optfine PEN OTFTs. The planarisation layer on Optfine PEN leads to improved OTFT mobility compared to Teonex PEN; however the Optfine PEN curved significantly upon heating and therefore presents a significant challenge if used as a free-standing substrate with our OTFT fabrication procedure.
机译:在塑料箔上进行大面积,卷对卷(R2R)的有机薄膜电路制造需要低成本的制造并将器件集成到柔性塑料基板上。我们已经开发出一种完全干燥的工艺[1],以制造适合R2R处理的具有10nm厚电介质的低压有机薄膜晶体管(OTFT)。比较了两种市售的聚萘二甲酸乙二醇酯(PEN)塑料箔(杜邦Teijin [2])作为可能的柔性基材。 Teonex Q65FA的底侧具有粘合层,以防止其在R2R工艺过程中打滑,而Optfine PQA1的顶侧(器件)侧具有平坦化层。在制造OTFT之前,先将PEN薄膜在160°C下预退火24小时。 160°C是我们的OTFT制造过程中使用的最高温度,预退火应减轻OTFT制造过程中的层对层错位。预退火步骤后,Teonex Q65FA保持平坦,而退火后Optfine PQA1的曲率半径从17cm变为1.5 cm。因此,我们在未退火的Optfine和预退火的Teonex箔上制造了Al / AlOx / C8PA / DNTT / Au和Al / AlOx / DNTT / Au OTFT。选择Dinaphthothienothiophene(DNTT)是因为其出色的空气稳定性,并且添加正辛基膦酸(C8PA)可以改善其生长。在室温下,分别在Teonex和Optfine上以0.4Å/ s和0.6Å/ s的速率沉积15 nm的DNTT。通过测量0至-2 V之间的传输特性并提取场效应迁移率,阈值电压,亚阈值斜率等来评估OTFT的初始性能。在初始测量后约一周的栅极电压为-时,执行偏压应力。源极和漏极接地时为2V。参见表1,在初始应力测量和偏置应力测量之间在真空中保存一周,导致OTFT阈值电压降低,迁移率和截止电流提高。图1显示了从在-2 V的漏极电压下测得的传输特性中提取的成品OTFT参数。对于两种测试的PEN基板,包含C8PA单层都会增加场效应迁移率,导通电流和导通/关断电流减小亚阈值斜率和关断电流。基材以混合方式影响OTFT性能。将OTFT与C8PA单层Teonex PEN进行比较,其亚阈值斜率和截止电流比Optfine PEN膜略低。但是,Optfine膜的场效应迁移率大约高三倍(0.14 cm2 / Vs),而导通电流大约高一个数量级。即使在偏置应力开始时其阈值电压比在Teonex PEN上制造的OTFT的阈值电压低-0.4 V,Optfine PEN基板上的OTFT在迁移率方面施加偏置应力后也似乎保持更稳定。总而言之,发现Teonex PEN更易于操作,因为在160°C加热时它保持平坦。但是,与Optfine PEN OTFT相比,AlOx / C8PA晶体管的场效应迁移率低约三倍。与Teonex PEN相比,Optfine PEN上的平面化层可提高OTFT的移动性;然而,Optfine PEN在加热时会明显弯曲,因此,如果将其用作我们的OTFT制造程序中的独立式衬底,则将面临巨大挑战。

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