Subwavelength grating Bragg grating filters in silicon-on-insulator

摘要

Narrowband filters based on Bragg gratings (BGs) in subwavelength grating (SWG) waveguides in silicon-on-insulator are reported. The SWG BGs are fabricated using electron beam lithography with a single etch. For SWG BGs 1.12 mm in length, the measured 3 dB bandwidths are ~ 0.5 nm and have a peak reflectivity as high as 94.4% in the C-band.