Zero phase robust control of XY table linear servo system

摘要

For direct drive XY table servo system, position control is designed. Considering the error which is caused by the disturbance of the system, friction factor and so on. The control method combing the zero phase error tracking controller (ZPETC) with the disturbance observer (DOB) is adopted. The system tracking error is reduced by adopting ZPETC, and through influences of disturbance to the system is diminished by the disturbance observer. Thus the tracking accuracy and robustness of the system are improved. Simulation results show that this control scheme is effective. It can obviously improve the accuracy of the system. © (2013) Trans Tech Publications, Switzerland.