Research and development of a novel DeviceNet-Oriented interface system for IC equipment

摘要

At present, the interface system in IC equipment control software system has to be changed even when a small hardware change occurs, which increases the time and cost of system debugging. This is one of the technical problems needed to be solved in course of development of IC equipment control system software.Therefore, the characteristics of the semiconductor device in IC equipment which used the DeviceNet has been analyzed in this paper. Then one DeviceNet-Oriented interface system, which is capable of shielding the difference of the details of the hardware, has been designed and developed. © (2013) Trans Tech Publications, Switzerland.