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Микропрочностные свойства монокристаллического кремния, выращенного при наложении на расплав сложных электромагнитных полей

机译:通过向熔体施加复杂的电磁场而生长的单晶硅的微强度特性

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摘要

MICROSTRENGTH PROPERTIES OF SILICON SINGLE CRYSTAL RECEIVEDFROM THE MELT UNDER THE INFLUENCE OF COMBINED MAGNETIC FIELDS / D. BRINKEVICH, N. VABISCHEVICH, S. VABISCHEVICH / Silicon single crystals received by Czochralski method from the melt under the influence of combined dynamic and steady magnetic fields were investigated by microindtntion method. It is experimentally shown, that microstrengten characteristics of silicon single crystal (microhardness Н, microfragility Z, factor of viscosity of destruction К1С and effective energy of destruction γ) depend on conditions of receipt (parameters of magnetic fields). Essential distinctions of microstrengten properties of the samples which have been cut out from the bottom and top parts of the same ingot are found out. The specified features of microstrengten properties are caused by distinctions in defect-impurity structure of investigated wafers.
机译:联合磁场影响下硅单晶接收玻璃的微强度特性通过微引力法进行研究。实验表明,硅单晶的微强度特性(显微硬度Н,微脆性Z,破坏粘度К1С和破坏有效能量γ)取决于接收条件(磁场参数)。发现了从同一铸锭的底部和顶部切出的样品的微强度特性的本质区别。微强度特性的特定特征是由所研究晶片的缺陷-杂质结构的差异引起的。

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