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Thermal Stress in Thin Films using Real-time Holographic Interferometry

机译:实时全息干涉法测量薄膜中的热应力

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摘要

With the numerous applications of thin films, the mechanical properties of thin films are becoming increasingly important. Of these, the fact that internal stresses exist in thin films has been known for over a hundred years. Stresses in evaporated thin films have been a topic of study by many workers and many good reviews have come out (1.2). Besides the internal stress, the thermal stress arising out of the difference in thermal coefficient of expansion of the substrate and film material also becomes important. Though much data is available for internal stress in thin films, the data for thermal stress is scanty. It is in this context a study has been undertaken to set up a novel technique of measurement of thermal stress of thin films using real-time holographic interferometry. Using this technique thermal stress in conductive coatings has been studied and some results on iron and copper films are presented.
机译:随着薄膜的众多应用,薄膜的机械性能变得越来越重要。其中,薄膜中存在内应力这一事实已经有一百多年的历史了。蒸发薄膜中的应力一直是许多工人研究的话题,并且已经有许多不错的评论(1.2)。除了内部应力之外,由基板和膜材料的热膨胀系数的差异引起的热应力也变得重要。尽管有很多数据可用于薄膜内应力,但热应力数据却很少。在这种情况下,已经进行了研究以建立使用实时全息干涉法测量薄膜热应力的新技术。使用这种技术,已经研究了导电涂层中的热应力,并给出了在铁和铜膜上的一些结果。

著录项

  • 作者

    Ramprasad BS; Radha TS;

  • 作者单位
  • 年度 1989
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  • 原文格式 PDF
  • 正文语种 {"code":"en","name":"English","id":9}
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